Process dispersion monitoring: Innovative AEWMA control chart in semiconductor manufacturing
This study introduces a novel adaptive exponentially weighted moving average (AEWMA) control chart for monitoring process dispersion, employing adaptation to determine the smoothing constant. It is designed to effectively track shifts within expected ranges in process dispersion by computing the smo...
| প্রধান লেখক: | , , , , |
|---|---|
| বিন্যাস: | প্রবন্ধ |
| ভাষা: | English |
| প্রকাশিত: |
AIP Publishing LLC
2024-01-01
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| মালা: | AIP Advances |
| অনলাইন ব্যবহার করুন: | http://dx.doi.org/10.1063/5.0190533 |