An introduction to lithography methods and providing a practical method for its optimization
In the first part of the present article, the important and main methods of photolithography are reviewed and discussed. Then we introduce the ways to improve the images created on the photoresist, which is the main material of lithography. Lithography with high-energy particle and soft lithography...
| Main Authors: | , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
Isfahan University of Technology
2022-05-01
|
| Series: | Iranian Journal of Physics Research |
| Subjects: | |
| Online Access: | https://ijpr.iut.ac.ir/article_1761_86d9864914e0e13e9d6c050a3b2d04a0.pdf |