A touch mode MEMS capacitance diaphragm gauge
This paper presents a touch mode MEMS capacitance diaphragm gauge (CDG) for differential pressure measurement. The design principle of the gauge is demonstrated, then the diaphragm deflection and capacitance sensitivity are analyzed theoretically. Experimental work was carried out using a principle...
| Main Authors: | , , , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
Elsevier
2021-12-01
|
| Series: | Measurement: Sensors |
| Subjects: | |
| Online Access: | http://www.sciencedirect.com/science/article/pii/S2665917421001343 |