A touch mode MEMS capacitance diaphragm gauge
This paper presents a touch mode MEMS capacitance diaphragm gauge (CDG) for differential pressure measurement. The design principle of the gauge is demonstrated, then the diaphragm deflection and capacitance sensitivity are analyzed theoretically. Experimental work was carried out using a principle...
| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
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Elsevier
2021-12-01
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| Series: | Measurement: Sensors |
| Subjects: | |
| Online Access: | http://www.sciencedirect.com/science/article/pii/S2665917421001343 |
| _version_ | 1818694103082205184 |
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| author | Gang Li Xiaodong Han Wenjun Sun Yongjun Cheng Detian Li |
| author_facet | Gang Li Xiaodong Han Wenjun Sun Yongjun Cheng Detian Li |
| author_sort | Gang Li |
| collection | DOAJ |
| description | This paper presents a touch mode MEMS capacitance diaphragm gauge (CDG) for differential pressure measurement. The design principle of the gauge is demonstrated, then the diaphragm deflection and capacitance sensitivity are analyzed theoretically. Experimental work was carried out using a principle prototype, which has a square pressure-sensing diaphragm with large width-to-thickness ratio. The test results are consistent with the theoretical model for pressure from 1 Pa to 1000 Pa, and the capacitance-pressure curve of the gauge is near linear in three pressure sections and a maximum sensitivity of 135 fF/Pa is achieved in low pressure range. Moreover, high pressure test results ranging from 1000 Pa to atmospheric pressure indicate that the developed touch mode gauge has wide load range and good overload protection. |
| first_indexed | 2024-12-17T13:24:15Z |
| format | Article |
| id | doaj.art-2aa2aa6a9cf545668578fbd1bf13c8e9 |
| institution | Directory Open Access Journal |
| issn | 2665-9174 |
| language | English |
| last_indexed | 2024-12-17T13:24:15Z |
| publishDate | 2021-12-01 |
| publisher | Elsevier |
| record_format | Article |
| series | Measurement: Sensors |
| spelling | doaj.art-2aa2aa6a9cf545668578fbd1bf13c8e92022-12-21T21:46:46ZengElsevierMeasurement: Sensors2665-91742021-12-0118100171A touch mode MEMS capacitance diaphragm gaugeGang Li0Xiaodong Han1Wenjun Sun2Yongjun Cheng3Detian Li4Corresponding author.; Science and Technology on Vacuum Technology and Physics Laboratory, Lanzhou Institute of Physics, Lanzhou, ChinaSchool of Aerospace Engineering, Xiamen University, Xiamen, ChinaScience and Technology on Vacuum Technology and Physics Laboratory, Lanzhou Institute of Physics, Lanzhou, ChinaScience and Technology on Vacuum Technology and Physics Laboratory, Lanzhou Institute of Physics, Lanzhou, ChinaScience and Technology on Vacuum Technology and Physics Laboratory, Lanzhou Institute of Physics, Lanzhou, ChinaThis paper presents a touch mode MEMS capacitance diaphragm gauge (CDG) for differential pressure measurement. The design principle of the gauge is demonstrated, then the diaphragm deflection and capacitance sensitivity are analyzed theoretically. Experimental work was carried out using a principle prototype, which has a square pressure-sensing diaphragm with large width-to-thickness ratio. The test results are consistent with the theoretical model for pressure from 1 Pa to 1000 Pa, and the capacitance-pressure curve of the gauge is near linear in three pressure sections and a maximum sensitivity of 135 fF/Pa is achieved in low pressure range. Moreover, high pressure test results ranging from 1000 Pa to atmospheric pressure indicate that the developed touch mode gauge has wide load range and good overload protection.http://www.sciencedirect.com/science/article/pii/S2665917421001343MEMSTouch modeSquare diaphragmCapacitance vacuum gauge |
| spellingShingle | Gang Li Xiaodong Han Wenjun Sun Yongjun Cheng Detian Li A touch mode MEMS capacitance diaphragm gauge Measurement: Sensors MEMS Touch mode Square diaphragm Capacitance vacuum gauge |
| title | A touch mode MEMS capacitance diaphragm gauge |
| title_full | A touch mode MEMS capacitance diaphragm gauge |
| title_fullStr | A touch mode MEMS capacitance diaphragm gauge |
| title_full_unstemmed | A touch mode MEMS capacitance diaphragm gauge |
| title_short | A touch mode MEMS capacitance diaphragm gauge |
| title_sort | touch mode mems capacitance diaphragm gauge |
| topic | MEMS Touch mode Square diaphragm Capacitance vacuum gauge |
| url | http://www.sciencedirect.com/science/article/pii/S2665917421001343 |
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