Characterization and Correction of the Geometric Errors Using a Confocal Microscope for Extended Topography Measurement, Part II: Experimental Study and Uncertainty Evaluation
This paper presents the experimental implementations of the mathematical models and algorithms developed in Part I. Two experiments are carried out. The first experiment determines the correction coefficients of the mathematical model. The dot grid target is measured, and the measurement data are pr...
| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2019-10-01
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| Series: | Electronics |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2079-9292/8/11/1217 |