Thermal and electrical properties of silicon nitride substrates
This work presents the results of studies on the thermal and electrical properties of sintered silicon nitride to investigate the effects of non-oxide additives. With regard to electrical transport properties, a high electrical resistivity of 1014 ∼ 1015 Ωcm at 323 K was observed with Si3N4 substrat...
| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
AIP Publishing LLC
2017-09-01
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| Series: | AIP Advances |
| Online Access: | http://dx.doi.org/10.1063/1.4996314 |