Nano-positioning system using self-sensing function of giant magnetostrictive actuator
A micro-scale texture generated on the surface characterizes wettability, friction and optical property of the substrates. In recent years, demands for adapting such functional surface to the large scale and complex structure have increased in a variety of industries. In general, the micro-scale tex...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | Japanese |
| Published: |
The Japan Society of Mechanical Engineers
2015-08-01
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| Series: | Nihon Kikai Gakkai ronbunshu |
| Subjects: | |
| Online Access: | https://www.jstage.jst.go.jp/article/transjsme/81/832/81_15-00292/_pdf/-char/en |