High-Frequency Vibration Analysis of Piezoelectric Array Sensor under Lateral-Field-Excitation Based on Crystals with 3 m Point Group

High-Frequency Vibration Analysis of Piezoelectric Array Sensor under Lateral-Field-Excitation Based on Crystals with 3 m Point Group

Based on Mindlin’s first-order plate theory, the high-frequency vibrations of piezoelectric bulk acoustic wave array sensors under lateral-field-excitation based on crystals with 3 m point group are analyzed, and the spectral-frequency relationships are solved, based on which, the optimal length–thi...

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Bibliographic Details
Main Authors: Jiachao Xu, Hao Shi, Fei Sun, Zehuan Tang, Shuanghuizhi Li, Dudu Chen, Tingfeng Ma, Iren Kuznetsova, Ilya Nedospasov, Chao Zhang
Format: Article
Language:English
Published: MDPI AG 2022-05-01
Series:Sensors
Subjects:
bulk acoustic wave sensor
array devices
3 m point group crystals
lateral-field-excitation
energy trapping
Online Access:https://www.mdpi.com/1424-8220/22/9/3596

Internet

https://www.mdpi.com/1424-8220/22/9/3596

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