Manufacturing of a Compact Micro Air Bearing Device for Power Micro Electro Mechanical System (MEMS) Applications Using Silica Film Assisted Processing
The focus of this study is on the manufacturing of micro air bearings (MABs) using silica film assisted processing. Structure of the three-layer micro air bearing is described in detail and the salient process flow of etching and bonding is illustrated. The main manufacturing challenges and the meth...
| Main Authors: | , , , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2018-04-01
|
| Series: | Micromachines |
| Subjects: | |
| Online Access: | http://www.mdpi.com/2072-666X/9/4/166 |