Device engineering of p-CuAlO2/β-Ga2O3 interface: A staggered-gap band-alignment
In this work, by controlling the oxygen flow rate (OFR) (from 0% to 30%), we suggest using a p-type copper aluminum oxide (p-CuAlO2) interlayer to enhance the high breakdown and low leakage current for β-Ga2O3-based power device applications. Results of AFM measurements on p-CuAlO2 films performed u...
Main Authors: | , , , , , , , , , , , |
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Format: | Article |
Language: | English |
Published: |
Elsevier
2023-08-01
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Series: | Materials Today Advances |
Subjects: | |
Online Access: | http://www.sciencedirect.com/science/article/pii/S2590049823000620 |