Investigation of Temperature Sensing Capabilities of GaN/SiC and GaN/Sapphire Surface Acoustic Wave Devices

This paper proposes high sensitivity temperature sensors based on single port surface acoustic wave (SAW) devices with GHz resonance frequencies, developed on GaN/SiC and GaN/Sapphire, which permit wide range, accurate temperature determinations. In contrast with GaN/Si SAW based temperature sensors...

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Bibliographic Details
Main Authors: George Boldeiu, George E. Ponchak, Alexandra Nicoloiu, Claudia Nastase, Ioana Zdru, Adrian Dinescu, Alexandru Muller
Format: Article
Language:English
Published: IEEE 2022-01-01
Series:IEEE Access
Subjects:
Online Access:https://ieeexplore.ieee.org/document/9661430/