A two-degree-of-freedom controller for a high-precision air temperature control system with multiple disturbances
The key equipment to prevent precision machinery such as lithography from being influenced by air temperature fluctuation is a high-precision air temperature control (ATC) system. The ATC system developed for a lithography immersion testing platform suffers from the difficulties of multiple disturba...
| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Elsevier
2023-10-01
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| Series: | Case Studies in Thermal Engineering |
| Subjects: | |
| Online Access: | http://www.sciencedirect.com/science/article/pii/S2214157X23007487 |