Tantalum oxide thin films for electrochemical pH sensor
Present work demonstrates the fabrication and utilization of tantalum oxide (Ta _2 O _5 ) thin films as prominent pH sensing electrode material. Ta _2 O _5 film of 1 μ m thickness was deposited on glass substrates using physical vapor deposition technique. Structural and morphological studies were p...
| Main Authors: | , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
IOP Publishing
2020-01-01
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| Series: | Materials Research Express |
| Subjects: | |
| Online Access: | https://doi.org/10.1088/2053-1591/ab7ced |