APA (7th ed.) Citation

Li, C., Hsieh, J., & Chuang, Y. R. (2021). Experimental Investigation on the Sputtering Process for Tantalum Oxynitride Thin Films. MDPI AG.

Chicago Style (17th ed.) Citation

Li, Chuan, Jang-Hsing Hsieh, and Y. R. Chuang. Experimental Investigation on the Sputtering Process for Tantalum Oxynitride Thin Films. MDPI AG, 2021.

MLA (9th ed.) Citation

Li, Chuan, et al. Experimental Investigation on the Sputtering Process for Tantalum Oxynitride Thin Films. MDPI AG, 2021.