Effect of thermal annealing on grain size and phase changes in magnetron titanium oxide films
Thin TiO2 films were produced on single-crystal Si-wafers by magnetron sputtering. Subsequently, they were annealed in air at different temperatures. We researched the structure, the phase composition, the morphology, and the dimensional characteristics of the films before and after annealing using...
| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Peter the Great St.Petersburg Polytechnic University
2022-10-01
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| Series: | St. Petersburg Polytechnical University Journal: Physics and Mathematics |
| Subjects: | |
| Online Access: | https://physmath.spbstu.ru/article/2022.58.25/ |