Effect of thermal annealing on grain size and phase changes in magnetron titanium oxide films
Thin TiO2 films were produced on single-crystal Si-wafers by magnetron sputtering. Subsequently, they were annealed in air at different temperatures. We researched the structure, the phase composition, the morphology, and the dimensional characteristics of the films before and after annealing using...
| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
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Peter the Great St.Petersburg Polytechnic University
2022-10-01
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| Series: | St. Petersburg Polytechnical University Journal: Physics and Mathematics |
| Subjects: | |
| Online Access: | https://physmath.spbstu.ru/article/2022.58.25/ |
| _version_ | 1797989349513494528 |
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| author | Chekadanov Alexander Pugachevskii Maxim Aung Hein Kyaw Kuzmenko Alexander Storozhenko Anastasia |
| author_facet | Chekadanov Alexander Pugachevskii Maxim Aung Hein Kyaw Kuzmenko Alexander Storozhenko Anastasia |
| author_sort | Chekadanov Alexander |
| collection | DOAJ |
| description | Thin TiO2 films were produced on single-crystal Si-wafers by magnetron sputtering. Subsequently, they were annealed in air at different temperatures. We researched the structure, the phase composition, the morphology, and the dimensional characteristics of the films before and after annealing using X-ray diffraction, energy-dispersive and spectrophotometric analysis, scanning electron microscopy, and small-angle X-ray scattering. The analysis of the influence of annealing parameters on the characteristics of TiO2 films is carried out. The technique for determining the qualitative and quantitative phase composition of TiO2 during its polymorphic transformations at high temperature heating has been developed. It was found that TiO2 annealing at 400 ºC leads to crystallization of the anatase phase, and annealing at 600 ºC leads to transformations into the rutile phase. The optical band gap decreases with increasing temperature and with increasing annealing time. |
| first_indexed | 2024-04-11T08:17:50Z |
| format | Article |
| id | doaj.art-2c0d5fd91d78445b86e70b78ae99db60 |
| institution | Directory Open Access Journal |
| issn | 2405-7223 |
| language | English |
| last_indexed | 2024-04-11T08:17:50Z |
| publishDate | 2022-10-01 |
| publisher | Peter the Great St.Petersburg Polytechnic University |
| record_format | Article |
| series | St. Petersburg Polytechnical University Journal: Physics and Mathematics |
| spelling | doaj.art-2c0d5fd91d78445b86e70b78ae99db602022-12-22T04:35:03ZengPeter the Great St.Petersburg Polytechnic UniversitySt. Petersburg Polytechnical University Journal: Physics and Mathematics2405-72232022-10-01153.110.18721/JPM.153.12520714726Effect of thermal annealing on grain size and phase changes in magnetron titanium oxide filmsChekadanov Alexander0https://orcid.org/0000-0002-1652-7830Pugachevskii Maxim1https://orcid.org/0000-0002-5004-0823Aung Hein Kyaw2https://orcid.org/0000-0002-5761-8632Kuzmenko Alexander3https://orcid.org/0000-0001-7089-0692Storozhenko Anastasia4https://orcid.org/0000-0002-4995-7407Southwest State UniversitySouthwest State UniversitySouthwest State UniversitySouthwest State UniversitySouthwest State UniversityThin TiO2 films were produced on single-crystal Si-wafers by magnetron sputtering. Subsequently, they were annealed in air at different temperatures. We researched the structure, the phase composition, the morphology, and the dimensional characteristics of the films before and after annealing using X-ray diffraction, energy-dispersive and spectrophotometric analysis, scanning electron microscopy, and small-angle X-ray scattering. The analysis of the influence of annealing parameters on the characteristics of TiO2 films is carried out. The technique for determining the qualitative and quantitative phase composition of TiO2 during its polymorphic transformations at high temperature heating has been developed. It was found that TiO2 annealing at 400 ºC leads to crystallization of the anatase phase, and annealing at 600 ºC leads to transformations into the rutile phase. The optical band gap decreases with increasing temperature and with increasing annealing time.https://physmath.spbstu.ru/article/2022.58.25/titanium dioxideannealingphase compositionmorphologypolymorphic transformationsemsaxs |
| spellingShingle | Chekadanov Alexander Pugachevskii Maxim Aung Hein Kyaw Kuzmenko Alexander Storozhenko Anastasia Effect of thermal annealing on grain size and phase changes in magnetron titanium oxide films St. Petersburg Polytechnical University Journal: Physics and Mathematics titanium dioxide annealing phase composition morphology polymorphic transformation sem saxs |
| title | Effect of thermal annealing on grain size and phase changes in magnetron titanium oxide films |
| title_full | Effect of thermal annealing on grain size and phase changes in magnetron titanium oxide films |
| title_fullStr | Effect of thermal annealing on grain size and phase changes in magnetron titanium oxide films |
| title_full_unstemmed | Effect of thermal annealing on grain size and phase changes in magnetron titanium oxide films |
| title_short | Effect of thermal annealing on grain size and phase changes in magnetron titanium oxide films |
| title_sort | effect of thermal annealing on grain size and phase changes in magnetron titanium oxide films |
| topic | titanium dioxide annealing phase composition morphology polymorphic transformation sem saxs |
| url | https://physmath.spbstu.ru/article/2022.58.25/ |
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