A Novel On-Chip Liquid-Metal-Enabled Microvalve
A room temperature liquid metal-based microvalve has been proposed in this work. The microvalve has the advantages of easy fabrication, high flexibility, and a low leak rate. By designing a posts array in the channel, the liquid metal can be controlled to form a deformable valve boss and block the f...
| Main Authors: | , , , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2021-08-01
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| Series: | Micromachines |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2072-666X/12/9/1051 |