An ultra-compact angstrom-scale displacement sensor with large measurement range based on wavelength modulation
Optical displacement metrology is important in nanotechnology and used to identify positions and displacements of nanodevices. Although several methods have been proposed, a sensor with ultracompact size, angstrom-scale resolution, and large measurement range is still lacking. We propose an optical...
| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
De Gruyter
2022-02-01
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| Series: | Nanophotonics |
| Subjects: | |
| Online Access: | https://doi.org/10.1515/nanoph-2021-0754 |