Interface study on the effect of oxygen/nitrogen ratio in Ni/Ti multilayer deposited by reactive sputtering
Since the growth morphology along and perpendicular to the interface is important for supermirror applications, the dependence of this on the reactive gas has been investigated in Ni/Ti multilayers prepared by reactive magnetron sputtering with variable O _2 /N _2 ratios. The interface properties ar...
| Main Authors: | , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
IOP Publishing
2023-01-01
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| Series: | Materials Research Express |
| Subjects: | |
| Online Access: | https://doi.org/10.1088/2053-1591/ace592 |