Effect of Warm Crossing Rolling on the Microstructure, Texture and Annealing Behavior of High-Purity Tantalum
With advanced integrated circuit semiconductor chips, the uniformity of microstructure and texture is increasingly required for tantalum (Ta) targets. A combination of warm rolling and 135° cross rolling (CR) at the temperature of 500 °C and 800 °C, i.e., warm cross rolling (WCR), was carried out in...
Main Authors: | , , , , , |
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Format: | Article |
Language: | English |
Published: |
MDPI AG
2023-04-01
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Series: | Metals |
Subjects: | |
Online Access: | https://www.mdpi.com/2075-4701/13/5/838 |