Sliding Speed-Dependent Tribochemical Wear of Oxide-Free Silicon

Abstract Fundamental understanding of tribochemical wear mechanism of oxide-free single crystalline silicon (without native oxide layer) is essential to optimize the process of ultra-precision surface manufacturing. Here, we report sliding speed-dependent nanowear of oxide-free silicon against SiO2...

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Bibliographic Details
Main Authors: Lei Chen, Yaqiong Qi, Bingjun Yu, Linmao Qian
Format: Article
Language:English
Published: SpringerOpen 2017-06-01
Series:Nanoscale Research Letters
Subjects:
Online Access:http://link.springer.com/article/10.1186/s11671-017-2176-8