Sliding Speed-Dependent Tribochemical Wear of Oxide-Free Silicon
Abstract Fundamental understanding of tribochemical wear mechanism of oxide-free single crystalline silicon (without native oxide layer) is essential to optimize the process of ultra-precision surface manufacturing. Here, we report sliding speed-dependent nanowear of oxide-free silicon against SiO2...
Main Authors: | , , , |
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Format: | Article |
Language: | English |
Published: |
SpringerOpen
2017-06-01
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Series: | Nanoscale Research Letters |
Subjects: | |
Online Access: | http://link.springer.com/article/10.1186/s11671-017-2176-8 |