Unraveling the Morphological Evolution and Etching Kinetics of Porous Silicon Nanowires During Metal-Assisted Chemical Etching

Unraveling the Morphological Evolution and Etching Kinetics of Porous Silicon Nanowires During Metal-Assisted Chemical Etching

Abstract Many potential applications of porous silicon nanowires (SiNWs) fabricated with metal-assisted chemical etching are highly dependent on the precise control of morphology for device optimization. However, the effects of key etching parameters, such as the amount of deposited metal catalyst,...

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Bibliographic Details
Main Authors: Lester U. Vinzons, Lei Shu, SenPo Yip, Chun-Yuen Wong, Leanne L. H. Chan, Johnny C. Ho
Format: Article
Language:English
Published: SpringerOpen 2017-06-01
Series:Nanoscale Research Letters
Subjects:
Silicon nanowire
Metal-assisted chemical etching
Silver catalyst
Silicon nanostructure
Porous silicon
Online Access:http://link.springer.com/article/10.1186/s11671-017-2156-z

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http://link.springer.com/article/10.1186/s11671-017-2156-z

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