Molecular Layer Deposition Using Ring-Opening Reactions: Molecular Modeling of the Film Growth and the Effects of Hydrogen Peroxide

Bibliographic Details
Main Authors:	Laura Keskiväli, Matti Putkonen, Eini Puhakka, Eija Kenttä, Jeroen Kint, Ranjith K. Ramachandran, Christophe Detavernier, Pekka Simell
Format:	Article
Language:	English
Published:	American Chemical Society 2018-07-01
Series:	ACS Omega
Online Access:	http://dx.doi.org/10.1021/acsomega.8b01301

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