A Method to Enhance Stroke Level of a MEMS Micromirror with Repulsive Electrostatic Force

A Method to Enhance Stroke Level of a MEMS Micromirror with Repulsive Electrostatic Force

This paper presents a method to enhance the stroke level of a MEMS micromirror that, unlike conventional micromirrors, is actuated using a repulsive electrostatic force. The designed and proposed micromirror is held by L-shaped arms suspended over a set of bottom electrodes. In this configuration, t...

Full description

Bibliographic Details
Main Authors: Niwit Aryal, Arezoo Emadi
Format: Article
Language:English
Published: MDPI AG 2020-04-01
Series:Micromachines
Subjects:
electrostatic actuation
fixed bottom electrodes
micro electromechanical systems
micromirror
repulsive electrostatic actuation
stroke
Online Access:https://www.mdpi.com/2072-666X/11/4/401

Internet

https://www.mdpi.com/2072-666X/11/4/401

Similar Items