A Method to Enhance Stroke Level of a MEMS Micromirror with Repulsive Electrostatic Force
This paper presents a method to enhance the stroke level of a MEMS micromirror that, unlike conventional micromirrors, is actuated using a repulsive electrostatic force. The designed and proposed micromirror is held by L-shaped arms suspended over a set of bottom electrodes. In this configuration, t...
| Main Authors: | , |
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| Format: | Article |
| Language: | English |
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MDPI AG
2020-04-01
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| Series: | Micromachines |
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| Online Access: | https://www.mdpi.com/2072-666X/11/4/401 |
| _version_ | 1827718857649815552 |
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| author | Niwit Aryal Arezoo Emadi |
| author_facet | Niwit Aryal Arezoo Emadi |
| author_sort | Niwit Aryal |
| collection | DOAJ |
| description | This paper presents a method to enhance the stroke level of a MEMS micromirror that, unlike conventional micromirrors, is actuated using a repulsive electrostatic force. The designed and proposed micromirror is held by L-shaped arms suspended over a set of bottom electrodes. In this configuration, three bottom electrodes are centered below each arm and are separated with a designed gap from each other to optimize the generated repulsive force. Using this approach, the micromirror surface is forced to deflect upward compared with the conventional downward deflection. The designed micromirror is proposed to utilize the PolyMUMPs fabrication technique from MEMSCAP Inc. In this work and in an unconventional approach, an air cavity of 2.75 µm can be achieved by combining the two available oxide layers through an additional removal of a polysilicon structural layer. It is shown that this design can significantly enhance the stroke level of the proposed micromirror to 5 µm at 150 V DC. |
| first_indexed | 2024-03-10T20:31:43Z |
| format | Article |
| id | doaj.art-2db5e328ea954ee98cf6b463bc13b8dc |
| institution | Directory Open Access Journal |
| issn | 2072-666X |
| language | English |
| last_indexed | 2024-03-10T20:31:43Z |
| publishDate | 2020-04-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Micromachines |
| spelling | doaj.art-2db5e328ea954ee98cf6b463bc13b8dc2023-11-19T21:20:14ZengMDPI AGMicromachines2072-666X2020-04-0111440110.3390/mi11040401A Method to Enhance Stroke Level of a MEMS Micromirror with Repulsive Electrostatic ForceNiwit Aryal0Arezoo Emadi1Department of Electrical and Computer Engineering, University of Windsor, Windsor, ON N9B 3P4, CanadaDepartment of Electrical and Computer Engineering, University of Windsor, Windsor, ON N9B 3P4, CanadaThis paper presents a method to enhance the stroke level of a MEMS micromirror that, unlike conventional micromirrors, is actuated using a repulsive electrostatic force. The designed and proposed micromirror is held by L-shaped arms suspended over a set of bottom electrodes. In this configuration, three bottom electrodes are centered below each arm and are separated with a designed gap from each other to optimize the generated repulsive force. Using this approach, the micromirror surface is forced to deflect upward compared with the conventional downward deflection. The designed micromirror is proposed to utilize the PolyMUMPs fabrication technique from MEMSCAP Inc. In this work and in an unconventional approach, an air cavity of 2.75 µm can be achieved by combining the two available oxide layers through an additional removal of a polysilicon structural layer. It is shown that this design can significantly enhance the stroke level of the proposed micromirror to 5 µm at 150 V DC.https://www.mdpi.com/2072-666X/11/4/401electrostatic actuationfixed bottom electrodesmicro electromechanical systemsmicromirrorrepulsive electrostatic actuationstroke |
| spellingShingle | Niwit Aryal Arezoo Emadi A Method to Enhance Stroke Level of a MEMS Micromirror with Repulsive Electrostatic Force Micromachines electrostatic actuation fixed bottom electrodes micro electromechanical systems micromirror repulsive electrostatic actuation stroke |
| title | A Method to Enhance Stroke Level of a MEMS Micromirror with Repulsive Electrostatic Force |
| title_full | A Method to Enhance Stroke Level of a MEMS Micromirror with Repulsive Electrostatic Force |
| title_fullStr | A Method to Enhance Stroke Level of a MEMS Micromirror with Repulsive Electrostatic Force |
| title_full_unstemmed | A Method to Enhance Stroke Level of a MEMS Micromirror with Repulsive Electrostatic Force |
| title_short | A Method to Enhance Stroke Level of a MEMS Micromirror with Repulsive Electrostatic Force |
| title_sort | method to enhance stroke level of a mems micromirror with repulsive electrostatic force |
| topic | electrostatic actuation fixed bottom electrodes micro electromechanical systems micromirror repulsive electrostatic actuation stroke |
| url | https://www.mdpi.com/2072-666X/11/4/401 |
| work_keys_str_mv | AT niwitaryal amethodtoenhancestrokelevelofamemsmicromirrorwithrepulsiveelectrostaticforce AT arezooemadi amethodtoenhancestrokelevelofamemsmicromirrorwithrepulsiveelectrostaticforce AT niwitaryal methodtoenhancestrokelevelofamemsmicromirrorwithrepulsiveelectrostaticforce AT arezooemadi methodtoenhancestrokelevelofamemsmicromirrorwithrepulsiveelectrostaticforce |