Study on the performance of thin-film VCSELs on composite metal substrate
Abstract Thin film p-side up vertical-cavity surface-emitting lasers (VCSELs) with 940 nm wavelength on a composite metal (Copper/Invar/Copper; CIC) substrate has been demonstrated by twice-bonding transfer and substrate removing techniques. The CIC substrate is a sandwich structure with a 10 µm thi...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Springer & Higher Education Press
2023-11-01
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| Series: | Frontiers of Optoelectronics |
| Subjects: | |
| Online Access: | https://doi.org/10.1007/s12200-023-00086-z |