A novel MEMS S-springs vibrating ring gyroscope with atmosphere package
This study presents a new MEMS vibrating ring gyroscope (VRG), which is driven by electrostatic force and detected by capacitance. A novel ring resonator with eight S-shaped symmetrical supporting springs is developed based on the advantageous characteristics of a thin-shell vibrating gyroscope. The...
| Main Authors: | , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
AIP Publishing LLC
2017-12-01
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| Series: | AIP Advances |
| Online Access: | http://dx.doi.org/10.1063/1.5002156 |