A novel MEMS S-springs vibrating ring gyroscope with atmosphere package
This study presents a new MEMS vibrating ring gyroscope (VRG), which is driven by electrostatic force and detected by capacitance. A novel ring resonator with eight S-shaped symmetrical supporting springs is developed based on the advantageous characteristics of a thin-shell vibrating gyroscope. The...
| Main Authors: | , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
AIP Publishing LLC
2017-12-01
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| Series: | AIP Advances |
| Online Access: | http://dx.doi.org/10.1063/1.5002156 |
| _version_ | 1818010264316936192 |
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| author | Zhiwei Kou Jun Liu Huiliang Cao Yunbo Shi Jianjun Ren Yingjie Zhang |
| author_facet | Zhiwei Kou Jun Liu Huiliang Cao Yunbo Shi Jianjun Ren Yingjie Zhang |
| author_sort | Zhiwei Kou |
| collection | DOAJ |
| description | This study presents a new MEMS vibrating ring gyroscope (VRG), which is driven by electrostatic force and detected by capacitance. A novel ring resonator with eight S-shaped symmetrical supporting springs is developed based on the advantageous characteristics of a thin-shell vibrating gyroscope. The capacitance electrodes, including the drive electrodes, the sense electrodes and the mode control electrodes, are designed according to the vibration characteristics of the ring resonator and the shape of the supporting springs. In addition, the operational principle of these electrode capacitors and the electrostatic force of the drive electrodes are discussed in detail. The gyroscope with high aspect-ratio structures is manufactured through an efficient fabrication process. Finally, the performance characteristics of the fabricated VRG are tested, and the experimentally obtained the zero-bias instability is about 0.0167°/s and angle random walk (ARW) is about 0.1363°/s1/2 at room temperature. Experimental results show that the VRG has a simple structure and relatively better performance characteristics for low and medium angular velocity measurements. |
| first_indexed | 2024-04-14T05:53:06Z |
| format | Article |
| id | doaj.art-2dcc561516174c4d899764d2e6d8f891 |
| institution | Directory Open Access Journal |
| issn | 2158-3226 |
| language | English |
| last_indexed | 2024-04-14T05:53:06Z |
| publishDate | 2017-12-01 |
| publisher | AIP Publishing LLC |
| record_format | Article |
| series | AIP Advances |
| spelling | doaj.art-2dcc561516174c4d899764d2e6d8f8912022-12-22T02:09:02ZengAIP Publishing LLCAIP Advances2158-32262017-12-01712125301125301-910.1063/1.5002156018711ADVA novel MEMS S-springs vibrating ring gyroscope with atmosphere packageZhiwei Kou0Jun Liu1Huiliang Cao2Yunbo Shi3Jianjun Ren4Yingjie Zhang5Science and Technology on Electronic Test & Measurement Laboratory, North University of China, Tai Yuan 030051, ChinaScience and Technology on Electronic Test & Measurement Laboratory, North University of China, Tai Yuan 030051, ChinaScience and Technology on Electronic Test & Measurement Laboratory, North University of China, Tai Yuan 030051, ChinaScience and Technology on Electronic Test & Measurement Laboratory, North University of China, Tai Yuan 030051, ChinaScience and Technology on Electronic Test & Measurement Laboratory, North University of China, Tai Yuan 030051, ChinaScience and Technology on Electronic Test & Measurement Laboratory, North University of China, Tai Yuan 030051, ChinaThis study presents a new MEMS vibrating ring gyroscope (VRG), which is driven by electrostatic force and detected by capacitance. A novel ring resonator with eight S-shaped symmetrical supporting springs is developed based on the advantageous characteristics of a thin-shell vibrating gyroscope. The capacitance electrodes, including the drive electrodes, the sense electrodes and the mode control electrodes, are designed according to the vibration characteristics of the ring resonator and the shape of the supporting springs. In addition, the operational principle of these electrode capacitors and the electrostatic force of the drive electrodes are discussed in detail. The gyroscope with high aspect-ratio structures is manufactured through an efficient fabrication process. Finally, the performance characteristics of the fabricated VRG are tested, and the experimentally obtained the zero-bias instability is about 0.0167°/s and angle random walk (ARW) is about 0.1363°/s1/2 at room temperature. Experimental results show that the VRG has a simple structure and relatively better performance characteristics for low and medium angular velocity measurements.http://dx.doi.org/10.1063/1.5002156 |
| spellingShingle | Zhiwei Kou Jun Liu Huiliang Cao Yunbo Shi Jianjun Ren Yingjie Zhang A novel MEMS S-springs vibrating ring gyroscope with atmosphere package AIP Advances |
| title | A novel MEMS S-springs vibrating ring gyroscope with atmosphere package |
| title_full | A novel MEMS S-springs vibrating ring gyroscope with atmosphere package |
| title_fullStr | A novel MEMS S-springs vibrating ring gyroscope with atmosphere package |
| title_full_unstemmed | A novel MEMS S-springs vibrating ring gyroscope with atmosphere package |
| title_short | A novel MEMS S-springs vibrating ring gyroscope with atmosphere package |
| title_sort | novel mems s springs vibrating ring gyroscope with atmosphere package |
| url | http://dx.doi.org/10.1063/1.5002156 |
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