A novel MEMS S-springs vibrating ring gyroscope with atmosphere package
This study presents a new MEMS vibrating ring gyroscope (VRG), which is driven by electrostatic force and detected by capacitance. A novel ring resonator with eight S-shaped symmetrical supporting springs is developed based on the advantageous characteristics of a thin-shell vibrating gyroscope. The...
Main Authors: | Zhiwei Kou, Jun Liu, Huiliang Cao, Yunbo Shi, Jianjun Ren, Yingjie Zhang |
---|---|
Format: | Article |
Language: | English |
Published: |
AIP Publishing LLC
2017-12-01
|
Series: | AIP Advances |
Online Access: | http://dx.doi.org/10.1063/1.5002156 |
Similar Items
-
Design, Fabrication and Experiment of Double U-Beam MEMS Vibration Ring Gyroscope
by: Huiliang Cao, et al.
Published: (2019-03-01) -
Research overview of anti-high overload MEMS gyroscope
by: Huiliang CAO, et al.
Published: (2018-08-01) -
Optimization and Experimentation of Dual-Mass MEMS Gyroscope Quadrature Error Correction Methods
by: Huiliang Cao, et al.
Published: (2016-01-01) -
MEMS Vibrating Ring Gyroscope with Worm-Shaped Support Springs for Space Applications
by: Waqas Amin Gill, et al.
Published: (2022-12-01) -
MEMS Gyroscope Temperature Compensation Based on Drive Mode Vibration Characteristic Control
by: Min Cui, et al.
Published: (2019-04-01)