Complex Research on Amorphous Vanadium Oxide Thin Films Deposited by Gas Impulse Magnetron Sputtering
In this work, a complex examination of vanadium oxide thin films prepared by gas impulse magnetron sputtering with various Ar:O<sub>2</sub> gas ratios of 2:1 ÷ 8:1 was conducted. X-ray diffraction revealed the amorphous nature of the prepared thin films, and scanning electron microscopy...
| Main Authors: | , , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2022-09-01
|
| Series: | Applied Sciences |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2076-3417/12/18/8966 |