A Three-Dimensional Finite Element Analysis Model of SAW Torque Sensor with Multilayer Structure
A three-dimensional finite element analysis model of surface acoustic wave (SAW) torque sensor based on multilayer structure is proposed in this paper. Compared with the traditional saw torque sensor with quartz as piezoelectric substrate, the SAW torque sensor with multilayer structure has the adva...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2022-03-01
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| Series: | Sensors |
| Subjects: | |
| Online Access: | https://www.mdpi.com/1424-8220/22/7/2600 |