A Three-Dimensional Finite Element Analysis Model of SAW Torque Sensor with Multilayer Structure
A three-dimensional finite element analysis model of surface acoustic wave (SAW) torque sensor based on multilayer structure is proposed in this paper. Compared with the traditional saw torque sensor with quartz as piezoelectric substrate, the SAW torque sensor with multilayer structure has the adva...
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| Format: | Article |
| Language: | English |
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MDPI AG
2022-03-01
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| Series: | Sensors |
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| Online Access: | https://www.mdpi.com/1424-8220/22/7/2600 |
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| author | Zhipeng Li Xu Meng Bonan Wang Chao Zhang |
| author_facet | Zhipeng Li Xu Meng Bonan Wang Chao Zhang |
| author_sort | Zhipeng Li |
| collection | DOAJ |
| description | A three-dimensional finite element analysis model of surface acoustic wave (SAW) torque sensor based on multilayer structure is proposed in this paper. Compared with the traditional saw torque sensor with quartz as piezoelectric substrate, the SAW torque sensor with multilayer structure has the advantages of fast propagation speed and high characteristic frequency. It is a very promising torque sensor, but there is very little related research. In order to successfully develop the sensor, it is essential to understand the propagation characteristics and torque sensing mode of SAW in multilayer structure. Therefore, in this study, we first established a multi-layered finite element analysis model of SAW device based on IDT/128° Y-X lithium niobate/diamond/Si (100). Then, the effects of different film thicknesses on the characteristic frequency, electromechanical coupling coefficient, s parameter, and mechanical quality factor of SAW device without changing the wavelength are analyzed. Then, based on the finite element analysis, a three-dimensional research model of a new SAW torque sensor suitable for small diameter torsion bar (d = 10 mm) is established, and the relationship between saw device deformation and torque under the condition of small torque (±40 Nm) is tested. The shape variable is introduced into the finite element analysis model of multi-layer SAW device. Finally, the relationship between saw torque sensor with multi-layer structure and torque is established by using the deformation relationship, which shows the perfect curve of sensor performance. |
| first_indexed | 2024-03-09T11:26:20Z |
| format | Article |
| id | doaj.art-2de5c85c414845e3ab7a85bc94201df1 |
| institution | Directory Open Access Journal |
| issn | 1424-8220 |
| language | English |
| last_indexed | 2024-03-09T11:26:20Z |
| publishDate | 2022-03-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Sensors |
| spelling | doaj.art-2de5c85c414845e3ab7a85bc94201df12023-12-01T00:01:45ZengMDPI AGSensors1424-82202022-03-01227260010.3390/s22072600A Three-Dimensional Finite Element Analysis Model of SAW Torque Sensor with Multilayer StructureZhipeng Li0Xu Meng1Bonan Wang2Chao Zhang3School of Transportation, Northeast Forestry University, Harbin 150040, ChinaSchool of Transportation, Northeast Forestry University, Harbin 150040, ChinaSchool of Transportation, Northeast Forestry University, Harbin 150040, ChinaSchool of Transportation, Northeast Forestry University, Harbin 150040, ChinaA three-dimensional finite element analysis model of surface acoustic wave (SAW) torque sensor based on multilayer structure is proposed in this paper. Compared with the traditional saw torque sensor with quartz as piezoelectric substrate, the SAW torque sensor with multilayer structure has the advantages of fast propagation speed and high characteristic frequency. It is a very promising torque sensor, but there is very little related research. In order to successfully develop the sensor, it is essential to understand the propagation characteristics and torque sensing mode of SAW in multilayer structure. Therefore, in this study, we first established a multi-layered finite element analysis model of SAW device based on IDT/128° Y-X lithium niobate/diamond/Si (100). Then, the effects of different film thicknesses on the characteristic frequency, electromechanical coupling coefficient, s parameter, and mechanical quality factor of SAW device without changing the wavelength are analyzed. Then, based on the finite element analysis, a three-dimensional research model of a new SAW torque sensor suitable for small diameter torsion bar (d = 10 mm) is established, and the relationship between saw device deformation and torque under the condition of small torque (±40 Nm) is tested. The shape variable is introduced into the finite element analysis model of multi-layer SAW device. Finally, the relationship between saw torque sensor with multi-layer structure and torque is established by using the deformation relationship, which shows the perfect curve of sensor performance.https://www.mdpi.com/1424-8220/22/7/2600surface acoustic wavemulti-layer structurehigh frequencyfinite element analysistorque sensor |
| spellingShingle | Zhipeng Li Xu Meng Bonan Wang Chao Zhang A Three-Dimensional Finite Element Analysis Model of SAW Torque Sensor with Multilayer Structure Sensors surface acoustic wave multi-layer structure high frequency finite element analysis torque sensor |
| title | A Three-Dimensional Finite Element Analysis Model of SAW Torque Sensor with Multilayer Structure |
| title_full | A Three-Dimensional Finite Element Analysis Model of SAW Torque Sensor with Multilayer Structure |
| title_fullStr | A Three-Dimensional Finite Element Analysis Model of SAW Torque Sensor with Multilayer Structure |
| title_full_unstemmed | A Three-Dimensional Finite Element Analysis Model of SAW Torque Sensor with Multilayer Structure |
| title_short | A Three-Dimensional Finite Element Analysis Model of SAW Torque Sensor with Multilayer Structure |
| title_sort | three dimensional finite element analysis model of saw torque sensor with multilayer structure |
| topic | surface acoustic wave multi-layer structure high frequency finite element analysis torque sensor |
| url | https://www.mdpi.com/1424-8220/22/7/2600 |
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