A Three-Dimensional Finite Element Analysis Model of SAW Torque Sensor with Multilayer Structure

A Three-Dimensional Finite Element Analysis Model of SAW Torque Sensor with Multilayer Structure

A three-dimensional finite element analysis model of surface acoustic wave (SAW) torque sensor based on multilayer structure is proposed in this paper. Compared with the traditional saw torque sensor with quartz as piezoelectric substrate, the SAW torque sensor with multilayer structure has the adva...

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Bibliographic Details
Main Authors: Zhipeng Li, Xu Meng, Bonan Wang, Chao Zhang
Format: Article
Language:English
Published: MDPI AG 2022-03-01
Series:Sensors
Subjects:
surface acoustic wave
multi-layer structure
high frequency
finite element analysis
torque sensor
Online Access:https://www.mdpi.com/1424-8220/22/7/2600

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