Glancing Angle Deposition Effect on Structure and Light-Induced Wettability of RF-Sputtered TiO2 Thin Films

Glancing Angle Deposition Effect on Structure and Light-Induced Wettability of RF-Sputtered TiO2 Thin Films

Crystalline TiO2 films were prepared on unheated glass substrates by radio frequency (RF) reactive magnetron sputtering at normal angle of incidence (a = 0°) and at glancing angle (a = 87°). The effect of the glancing angle on the structure, microstructure, and wetting properties of...

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Bibliographic Details
Main Authors: Vasiliki E. Vrakatseli, Alexandros N. Kalarakis, Angelos G. Kalampounias, Eleftherios K. Amanatides, Dimitrios S. Mataras
Format: Article
Language:English
Published: MDPI AG 2018-08-01
Series:Micromachines
Subjects:
sputtering
glancing angle
TiO2
superhydrophilic
hydrophilic
anatase
rutile
GLAD
porous titania
Online Access:http://www.mdpi.com/2072-666X/9/8/389

Internet

http://www.mdpi.com/2072-666X/9/8/389

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