Innovative process to obtain thin films and micro-nanostructured ZrN films from a photo-structurable ZrO2 sol-gel using rapid thermal nitridation

Innovative process to obtain thin films and micro-nanostructured ZrN films from a photo-structurable ZrO2 sol-gel using rapid thermal nitridation

Zirconium nitride (ZrN) is widely used in many industrial sectors for its outstanding performances including its mechanical properties, high chemical and thermal stability. Associated with its plasmonic behavior, these properties make ZrN a suitable candidate for optical applications at high tempera...

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Bibliographic Details
Main Authors: V. Vallejo-Otero, N. Crespo-Monteiro, A. Valour, C. Donnet, S. Reynaud, N. Ollier, M.F. Blanc Mignon, J.P. Chatelon, Y. Bleu, E. Gamet, Y. Jourlin
Format: Article
Language:English
Published: Elsevier 2023-12-01
Series:Materials Today Advances
Subjects:
Zirconium nitride
Sol-gel method
Rapid thermal nitridation
Optical properties
Micro-nanostructuring
Online Access:http://www.sciencedirect.com/science/article/pii/S2590049823000905

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http://www.sciencedirect.com/science/article/pii/S2590049823000905

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