Development of a Novel Silicon Membrane MEMS Capacitive Pressure Sensor for Biological Applications
MEMS capacitive pressure sensors have proven to be more reliable in terms of temperature drift and long-term stability when compared to MEMS piezoresistive pressure sensors. In this study, a MEMS capacitive pressure sensor using micromachined technology has been designed and fabricated. As the movab...
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| 格式: | Article |
| 語言: | English |
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MDPI AG
2023-10-01
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| 叢編: | Engineering Proceedings |
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| 在線閱讀: | https://www.mdpi.com/2673-4591/48/1/54 |