Hybrid Integration of Magnetoresistive Sensors with MEMS as a Strategy to Detect Ultra-Low Magnetic Fields

Hybrid Integration of Magnetoresistive Sensors with MEMS as a Strategy to Detect Ultra-Low Magnetic Fields

In this paper, we describe how magnetoresistive sensors can be integrated with microelectromechanical systems (MEMS) devices enabling the mechanical modulation of DC or low frequency external magnetic fields to high frequencies using MEMS structures incorporating magnetic flux guides. In such a hybr...

Full description

Bibliographic Details
Main Authors: João Valadeiro, Susana Cardoso, Rita Macedo, Andre Guedes, João Gaspar, Paulo P. Freitas
Format: Article
Language:English
Published: MDPI AG 2016-05-01
Series:Micromachines
Subjects:
magnetoresistive sensors
noise
MEMS
hybrid devices
frequency modulation
magnetic field detection
Online Access:http://www.mdpi.com/2072-666X/7/5/88

Internet

http://www.mdpi.com/2072-666X/7/5/88

Similar Items