Research on Integral Fabrication and Inner Surface Metallization of the High-Frequency Terahertz Hollow-Core Metal Rectangular Waveguide Cavity by a Combined Process Based on Wire Electrochemical Micromachining and Electrochemical Deposition
With the development of fabrication technology for terahertz rectangular cavity devices, the fabrication process of integral terahertz waveguide cavities has received much attention because of its beneficial effect on improving the transmission of terahertz signals. However, smaller feature sizes, h...
| Main Authors: | , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2022-08-01
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| Series: | Micromachines |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2072-666X/13/8/1346 |