RESEARCH OF INTERRELATION OF A DESIGN AND MANUFACTURING TECHNIQUES OF SEMI-CONDUCTOR DEVICES WITH THEIR PENETRATIVE PRESSURE

The estimation of influence of a design and technology of formation of transistor structure on value of penetrative pressure is spent. Dependences in SAD TCAD Synopsys for penetrative pressure from size of a superficial charge of various designs of the transistor are received.

Bibliographic Details
Main Author: A. R. Shakhmaeva
Format: Article
Language:Russian
Published: Dagestan State Technical University 2016-07-01
Series:Вестник Дагестанского государственного технического университета: Технические науки
Subjects:
Online Access:https://vestnik.dgtu.ru/jour/article/view/24