Analysis of Structural Design Variations in MEMS Capacitive Microphones
Different microstructures significantly affect the acoustic performance of MEMS capacitive microphones, particularly in key specifications of interest. This paper presents several microstructures, including rib-reinforced backplates, suspended diaphragms, and outer vent holes. Three MEMS microphone...
| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2025-02-01
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| Series: | Sensors |
| Subjects: | |
| Online Access: | https://www.mdpi.com/1424-8220/25/3/900 |