Tungsten oxide thin film for room temperature nitrogen dioxide gas sensing
Tungsten oxide (WO3) thin films for gas sensing have been successfully deposited using reactive direct current (DC) magnetron sputtering at different deposition temperatures (300 °C, 400 °C and 500 °C). The structural, morphological properties, thickness and composition have been investigated using...
Main Authors: | , , , , , , , , , |
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Format: | Article |
Language: | English |
Published: |
EDP Sciences
2023-01-01
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Series: | MATEC Web of Conferences |
Subjects: | |
Online Access: | https://www.matec-conferences.org/articles/matecconf/pdf/2023/01/matecconf_icarae2023_01003.pdf |