Tungsten oxide thin film for room temperature nitrogen dioxide gas sensing

Tungsten oxide (WO3) thin films for gas sensing have been successfully deposited using reactive direct current (DC) magnetron sputtering at different deposition temperatures (300 °C, 400 °C and 500 °C). The structural, morphological properties, thickness and composition have been investigated using...

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Bibliographic Details
Main Authors: Mpanza Thokozani, Ndlangamandla Ceboliyazakha L., Ngom Balla D., Nkosi Steven S., Jili Thulani P., Thethwayo Charles T., Biyela Puleng N., Cebekhulu Ntokozo G., Mkwae Prince S., Ogundipe Sunday A.
Format: Article
Language:English
Published: EDP Sciences 2023-01-01
Series:MATEC Web of Conferences
Subjects:
Online Access:https://www.matec-conferences.org/articles/matecconf/pdf/2023/01/matecconf_icarae2023_01003.pdf