Fully Integrated Ultrathin Solid Immersion Grating Microspectrometer for Handheld Visible and Near‐Infrared Spectroscopic Applications
Abstract Despite advances in microfabrication, compact spectrometers still face challenges in shrinking their size without sacrificing optical performance. Here, the solid immersion grating microspectrometer (SIG‐µSPEC) for high spectral resolution in a broad operational wavelength range is reporte...
Main Authors: | , , , |
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Format: | Article |
Language: | English |
Published: |
Wiley
2023-12-01
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Series: | Advanced Science |
Subjects: | |
Online Access: | https://doi.org/10.1002/advs.202304320 |