Comparison of AlN vs. SIO<sub>2</sub>/LiNbO<sub>3</sub> Membranes as Sensitive Elements for the SAW-Based Acceleration Measurement: Overcoming the Anisotropy Effects

Comparison of AlN vs. SIO<sub>2</sub>/LiNbO<sub>3</sub> Membranes as Sensitive Elements for the SAW-Based Acceleration Measurement: Overcoming the Anisotropy Effects

We propose the use of aluminum nitride (AlN) membranes acting as sensitive elements for the surface acoustic wave (SAW)-based acceleration measurement. The proposed solution is compared against existing prototypes based on the use of quartz (SiO<sub>2</sub>)/lithium niobate (LiNbO<sub...

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Bibliographic Details
Main Authors: Sergey Yu. Shevchenko, Denis A. Mikhailenko, Oleg A. Markelov
Format: Article
Language:English
Published: MDPI AG 2020-01-01
Series:Sensors
Subjects:
saw-sensor
saw-resonator
acceleration measurements
ring-shaped design
stress strained state
Online Access:https://www.mdpi.com/1424-8220/20/2/464

Internet

https://www.mdpi.com/1424-8220/20/2/464

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