Infrared Insight into the Network of Hydrogenated Amorphous and Polycrystalline Silicon thin Films
IR measurements were carried out on both amorphous and polycrystalline silicon samples deposited by PECVDon glass substrate. The transition from amorphous to polycrystalline phase was achieved by increasing dilution of silaneplasma at the deposition process. The samples were found to be mixed phase...
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| Format: | Article |
| Language: | English |
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VSB-Technical University of Ostrava
2006-01-01
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| Series: | Advances in Electrical and Electronic Engineering |
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| Online Access: | http://advances.utc.sk/index.php/AEEE/article/view/228 |