Infrared Insight into the Network of Hydrogenated Amorphous and Polycrystalline Silicon thin Films
IR measurements were carried out on both amorphous and polycrystalline silicon samples deposited by PECVDon glass substrate. The transition from amorphous to polycrystalline phase was achieved by increasing dilution of silaneplasma at the deposition process. The samples were found to be mixed phase...
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| Format: | Article |
| Language: | English |
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VSB-Technical University of Ostrava
2006-01-01
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| Series: | Advances in Electrical and Electronic Engineering |
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| Online Access: | http://advances.utc.sk/index.php/AEEE/article/view/228 |
| _version_ | 1827947699620544512 |
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| author | Jarmila Mullerova |
| author_facet | Jarmila Mullerova |
| author_sort | Jarmila Mullerova |
| collection | DOAJ |
| description | IR measurements were carried out on both amorphous and polycrystalline silicon samples deposited by PECVDon glass substrate. The transition from amorphous to polycrystalline phase was achieved by increasing dilution of silaneplasma at the deposition process. The samples were found to be mixed phase materials. Commonly, infrared spectra ofhydrogenated silicon thin films yield information about microstructure, hydrogen content and hydrogen bonding to silicon. Inthis paper, additional understanding was retrieved from infrared response. Applying standard optical laws, effective mediatheory and Clausius-Mossoti approach concerning the Si-Si and Si-H bonds under IR irradiation as individual oscillators,refractive indices in the long wavelength limit, crystalline, amorphous and voids volume fractions and the mass density of thefilms were determined. The mass density was found to decrease with increasing crystalline volume fraction, which can beattributed to the void-dominated mechanism of network formation. |
| first_indexed | 2024-04-09T12:43:59Z |
| format | Article |
| id | doaj.art-2f77392b079a42fcb465f2c95e87a0d4 |
| institution | Directory Open Access Journal |
| issn | 1336-1376 1804-3119 |
| language | English |
| last_indexed | 2024-04-09T12:43:59Z |
| publishDate | 2006-01-01 |
| publisher | VSB-Technical University of Ostrava |
| record_format | Article |
| series | Advances in Electrical and Electronic Engineering |
| spelling | doaj.art-2f77392b079a42fcb465f2c95e87a0d42023-05-14T20:50:05ZengVSB-Technical University of OstravaAdvances in Electrical and Electronic Engineering1336-13761804-31192006-01-0151354357257Infrared Insight into the Network of Hydrogenated Amorphous and Polycrystalline Silicon thin FilmsJarmila MullerovaIR measurements were carried out on both amorphous and polycrystalline silicon samples deposited by PECVDon glass substrate. The transition from amorphous to polycrystalline phase was achieved by increasing dilution of silaneplasma at the deposition process. The samples were found to be mixed phase materials. Commonly, infrared spectra ofhydrogenated silicon thin films yield information about microstructure, hydrogen content and hydrogen bonding to silicon. Inthis paper, additional understanding was retrieved from infrared response. Applying standard optical laws, effective mediatheory and Clausius-Mossoti approach concerning the Si-Si and Si-H bonds under IR irradiation as individual oscillators,refractive indices in the long wavelength limit, crystalline, amorphous and voids volume fractions and the mass density of thefilms were determined. The mass density was found to decrease with increasing crystalline volume fraction, which can beattributed to the void-dominated mechanism of network formation.http://advances.utc.sk/index.php/AEEE/article/view/228infraredcristallinemicrostructure. |
| spellingShingle | Jarmila Mullerova Infrared Insight into the Network of Hydrogenated Amorphous and Polycrystalline Silicon thin Films Advances in Electrical and Electronic Engineering infrared cristalline microstructure. |
| title | Infrared Insight into the Network of Hydrogenated Amorphous and Polycrystalline Silicon thin Films |
| title_full | Infrared Insight into the Network of Hydrogenated Amorphous and Polycrystalline Silicon thin Films |
| title_fullStr | Infrared Insight into the Network of Hydrogenated Amorphous and Polycrystalline Silicon thin Films |
| title_full_unstemmed | Infrared Insight into the Network of Hydrogenated Amorphous and Polycrystalline Silicon thin Films |
| title_short | Infrared Insight into the Network of Hydrogenated Amorphous and Polycrystalline Silicon thin Films |
| title_sort | infrared insight into the network of hydrogenated amorphous and polycrystalline silicon thin films |
| topic | infrared cristalline microstructure. |
| url | http://advances.utc.sk/index.php/AEEE/article/view/228 |
| work_keys_str_mv | AT jarmilamullerova infraredinsightintothenetworkofhydrogenatedamorphousandpolycrystallinesiliconthinfilms |