Preloading Piezoelectric Stack Actuator in High-speed Nanopositioning Systems
Recent development in high-speed nanotechnology applications such as scanning probe microscopy and nanofabrication has increased interest on the advancement of high-bandwidth flexure-guided nanopositioning systems. These systems are capable of providing motions with sub-nanometer resolution over a p...
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| Format: | Article |
| Language: | English |
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Frontiers Media S.A.
2016-10-01
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| Series: | Frontiers in Mechanical Engineering |
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| Online Access: | http://journal.frontiersin.org/Journal/10.3389/fmech.2016.00008/full |