Studying the Effect of Deposition Conditions on the Performance and Reliability of MEMS Gas Sensors

Studying the Effect of Deposition Conditions on the Performance and Reliability of MEMS Gas Sensors

In this paper, the reliability of a micro-electro-mechanical system (MEMS)-based gas sensor has been investigated using Three Dimensional (3D) coupled multiphysics Finite Element (FE) analysis. The coupled field analysis involved a two-way sequential electro- thermal fields coupling and a one-way se...

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Bibliographic Details
Main Authors: Walied Moussa, Khaled Sadek
Format: Article
Language:English
Published: MDPI AG 2007-03-01
Series:Sensors
Subjects:
MEMS gas sensors
Microfabrication
Nonlinearity
Reliability
Fatigue
Sensitivity
Computational Cost
High Performance Multiphysics Computation
Online Access:http://www.mdpi.com/1424-8220/7/3/319/

Internet

http://www.mdpi.com/1424-8220/7/3/319/

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