Development of a MEMS Multisensor Chip for Aerodynamic Pressure Measurements

Development of a MEMS Multisensor Chip for Aerodynamic Pressure Measurements

The existing instruments for aerodynamic pressure measurements are usually built around an array of discrete pressure sensors, placed in the same housing together with a few discrete temperature sensors. However, this approach is limiting, especially regarding miniaturization, sensor matching, and t...

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Bibliographic Details
Main Authors: Žarko Lazić, Milče M. Smiljanić, Dragan Tanasković, Milena Rašljić-Rafajilović, Katarina Cvetanović, Evgenija Milinković, Marko V. Bošković, Stevan Andrić, Predrag Poljak, Miloš Frantlović
Format: Article
Language:English
Published: MDPI AG 2023-11-01
Series:Engineering Proceedings
Subjects:
MEMS multisensor
pressure sensing
chip fabrication
Online Access:https://www.mdpi.com/2673-4591/58/1/52

Internet

https://www.mdpi.com/2673-4591/58/1/52

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