Two-dimensional imaging of crystal phase and stress component by micro-Raman spectroscope equipped with integral field unit
Micro-Raman spectroscopy is used to measure phases, stresses and strains in microstructures comprising semiconductor materials, such as Si. However, the two-dimensional Raman imaging techniques for directly observing phases and measuring stresses and strains in a large area are required. In this stu...
| Main Authors: | , , |
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| Format: | Article |
| Language: | Japanese |
| Published: |
The Japan Society of Mechanical Engineers
2018-01-01
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| Series: | Nihon Kikai Gakkai ronbunshu |
| Subjects: | |
| Online Access: | https://www.jstage.jst.go.jp/article/transjsme/84/857/84_17-00442/_pdf/-char/en |